Hot STM Labs
CVD & Nanofabrication

Selective nanoscale Pd Physical Vapor Deposition using the Atomic Hydrogen Resist
Selective nanoscale growth of Ti using Chemical Vapor Deposition of TiCl4 and Atomic Hydrogen Resist
Al Nanolithography using Chemical Vapor Deposition and Atomic Hydrogen Resist
Initial Stages of Al CVD Growth on Si(001) using Dimethylaluminum Hydride
The Adsorption of TiCl4 on the Si(001) Surface

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