Hot STM Labs
CVD & Nanofabrication

	Selective nanoscale Pd Physical Vapor Deposition using the Atomic Hydrogen Resist
	Selective nanoscale growth of Ti using Chemical Vapor Deposition of TiCl4 and Atomic Hydrogen Resist
	Al Nanolithography using Chemical Vapor Deposition and Atomic Hydrogen Resist
	Initial Stages of Al CVD Growth on Si(001) using Dimethylaluminum Hydride
	The Adsorption of TiCl4 on the Si(001) Surface

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Hot STM Labs